Polar surface preparation of nitride substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Dec 28, 2006
app pub date -
Jun 7, 2006
filing date -
Jun 10, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Fabrication of AlN substrates suitable for epitaxial deposition of high-quality nitride-based compounds thereon having at least one single-crystal and substantially planarized useful area exceeding about 1 cm.sup.2 with a peak-to-valley surface topography in the useful area being less than about 50 nm is accomplished by, for example, employing an active solution that reacts non-selectively with the substrate material.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully