Method for the removal of organic residues from finely structured surfaces

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Aug 21, 2006
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Nov 26, 2002

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Abstract

Method for removing of organic residues from finely structured surfaces, characterized in that the residues are incinerated by means of ozone.

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TECHNOTRANS AG	48336 SASSENBERG

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Inventor Name	Address	# of filed Patents	Total Citations
Kosters, Rainer	Horstel-Bevergern, DE	2	0
Oehler, Michael	Sassenberg, DE	2	0

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Method for the removal of organic residues from finely structured surfaces

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11507283

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11507283

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