Vertical nanotransistor, method for producing the same and memory assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20060263984A1
SERIAL NO

10568230

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Abstract

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A vertical nano-transistor having a source region, a drain region, a gate region and a semiconductor channel region between the source region and the drain region, the gate region being constituted by a metal film into which the transistor is embedded in such a manner that the gate region and the semiconductor channel region form a coaxial structure, the source region, the semiconductor channel region and the drain region being disposed vertically, and the gate region being electrically insulated from the source region, the drain region and the semiconductor channel region. The invention also relates to a method of producing the inventive transistor and a memory assembly.

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Patent Owner(s)

Patent OwnerAddress
HAHN-MEITNER-INSTITUTE BERLIN GMBHGLIENICKER STRASS 100 D-14109 BERLIN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jie Berlin, DE 1059 5911
Lux-Steiner, Martha Christina Berlin, DE 10 48

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