Dynamic reference plane compensation
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United States of America Patent
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Mar 17, 2009
Grant Date -
Nov 23, 2006
app pub date -
May 17, 2005
filing date -
May 17, 2005
priority date (Note) -
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Abstract
In one embodiment, a method of dynamic reference plane compensation, comprises impinging radiation from a first radiation source onto a surface of an object; generating an uncompensated measurement signal from radiation reflected from a first location on the surface and a second location; generating a compensation signal from radiation reflected from a third location and a fourth location on the surface; and generating a compensated measurement signal using the uncompensated measurement signal and the compensation signal.
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