Filling deep and wide openings with defect-free conductor
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United States of America Patent
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Issued Date -
Nov 9, 2006
app pub date -
Feb 9, 2006
filing date -
May 6, 2005
priority date (Note) -
Abandoned
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Abstract
Relatively large openings or features in integrated circuit metallization or packaging vias are filled by two plating or electrodeposition processes in sequence. The first electrodeposition process conformally lines the large, high aspect ratio features to define an inner cavity. The second electrodeposition process uses a different solution to bottom-up fill the inner cavity left by the first electrodeposition process. Conformality is typically induced by use of levelers during the first electrodeposition, while accelerators and suppressors may be used to promote bottom-up fill during the second electrodeposition, although either process may employ any of the three additives.
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