Plasma-assisted processing in a manufacturing line
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United States of America Patent
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app pub date -
Mar 17, 2006
filing date -
May 8, 2002
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Abandoned
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Abstract
Methods and apparatus are provided for plasma-assisted processing multiple work pieces in a manufacturing line. The manufacturing line can include a plurality of microwave cavities, each of the microwave cavities igniting and sustaining a microwave plasma. Work pieces can be shuttled between the plurality of microwave cavities on a conveyance system that controls the positioning of each of the work pieces.
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