Imprint lithography

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7762186
APP PUB NO 20060230959A1
SERIAL NO

11108904

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Abstract

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An imprint template configured to imprint an imprintable medium by an imprint lithography process is disclosed, the imprint template having a pattern with a pattern density corresponding to a volume of imprintable medium used to substantially fill pattern features per unit area of a contact face of the imprint template, wherein adjacent regions of the pattern on the imprint template contact face, each of which will provide different functionality once imprinted onto a substrate, have substantially the same pattern density, have differences in pattern density which are minimized, or differences in pattern density which are maintained below a maximum.

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Patent Owner(s)

Patent OwnerAddress
KONINKLIJKE PHILIPS ELECTRONICS N VHOLLAND IAN DEHO FINN EINDHOVEN NORTH BRABANT
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kolesnychenko, Aleksey Yurievich Helmond, NL 68 2643
Meijer, Peter Bartus Leonard Eindhoven, NL 6 44

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