Stabilized emitter and method for stabilizing same
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United States of America Patent
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N/A
Issued Date -
Oct 12, 2006
app pub date -
Mar 22, 2006
filing date -
Mar 22, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An emitter for a charged particle beam apparatus is provided, said emitter comprising a filament extending between and being attached to first and second supports, an emitter tip attached to the filament, and a stabilization element attached to a third support and to the filament, wherein the first, second and third supports define a triangle so that the stabilization element extends at least partially in a direction perpendicular to the direction in which the filament extends.
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