MEMS filter module with concentric filtering walls
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 5, 2006
app pub date -
Mar 31, 2005
filing date -
Mar 31, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A bidirectional flow MEMS filter module (40) is disclosed that uses a plurality of concentrically disposed filtering walls (60). The MEMS filter module (40) includes a first plate (44) having a plurality of first flow ports (48), as well as a second plate (52) having a plurality of second flow ports (56) that is spaced from and interconnected with the first plate (44). The above-noted filtering walls (60) extend from the second plate (52) at least toward the first plate (44). The first plate (44) and each filtering wall (60) are spaced from each other to define a filter trap (64). All flow through the MEMS filter module (40) must pass through at least one filter trap (64) prior to exiting the MEMS filter module (40), either through one or more of the first flow ports (48) or through one or more of the second flow ports (56).
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully