Oxide films containing titanium
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United States of America Patent
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app pub date -
Dec 22, 2005
filing date -
Jun 28, 2001
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Abandoned
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Abstract
Atomic layer deposition (ALD) type processes for producing titanium containing oxide thin films comprise feeding into a reaction space vapour phase pulses of titanium alkoxide as a titanium source material and at least one oxygen source material, such as ozone, capable of forming an oxide with the titanium source material. In preferred embodiments the titanium alkoxide is titanium methoxide.
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