MEMS flow module with piston-type pressure regulating structure
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United States of America Patent
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Issued Date -
Sep 14, 2006
app pub date -
Mar 14, 2005
filing date -
Mar 14, 2005
priority date (Note) -
Abandoned
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Abstract
Various embodiments of MEMS flow modules that regulate flow or pressure by the axial movement of a flow regulating or controlling structure are disclosed. One such MEMS flow module (40) has a regulator (66) that is aligned with and spaced from a first flow port (52) through a first plate (50). The regulator (66) is structurally interconnected with a flexible third plate (80). When the regulator (66) experiences at least a certain differential pressure, the regulator (66) moves at least generally axially away from the first plate (50) by a flexing of the third plate (80) at least generally away from the first plate (50). Increasing the spacing between the regulator (66) and the first plate (50) accommodates an increased flow or flow rate through the MEMS flow module (40).
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