Electronic device manufacture

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

11387425

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods for depositing uniform, pinhole-defect free organic polysilica coatings are provided. These methods allow for the use of these materials as spin-on cap layers in the manufacture of integrated circuits.

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Patent Owner(s)

Patent OwnerAddress
SHIPLEY COMPANY L L CMARLBOROUGH MA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adams, Timothy G Sudbury, MA 30 714
Calvert, Jeffrey M Acton, MA 41 1664
Gallagher, Michael K Hopkinton, MA 91 1302
Gronbeck, Dana A Holliston, MA 16 336
Prokopowicz, Gregory P Lancaster, MA 28 257

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