System and method for inspecting a workpiece surface using combinations of light collectors
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United States of America Patent
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Issued Date -
Aug 31, 2006
app pub date -
Dec 17, 2005
filing date -
Dec 19, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module. Also, a spherical defect channel is described for detection of small spherical objects and defects with like geometries, using scattered light observed by the back collector output and P-polarized scattered light observed by wing collectors
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