System and method for inspecting a workpiece surface by analyzing scattered light in a back quartersphere region above the workpiece
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United States of America Patent
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N/A
Issued Date -
Aug 31, 2006
app pub date -
Dec 17, 2005
filing date -
Dec 19, 2004
priority date (Note) -
Abandoned
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Abstract
A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
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