Circularly polarized light for optically inspecting workpieces
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United States of America Patent
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Issued Date -
Aug 17, 2006
app pub date -
Apr 22, 2005
filing date -
Jan 13, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method and apparatus for inspecting substrates in which a laser beam traces a path along the substrate surface. The laser beam is circularly polarized, e.g. by a quarter wave retarder. This permits inspecting the substrate with less sensitivity to scratch direction than if the laser beam were not circularly polarized.
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