Substrate susceptor for receiving a substrate to be deposited upon
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United States of America Patent
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app pub date -
Apr 7, 2006
filing date -
Apr 1, 2004
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Abandoned
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Abstract
This invention includes substrate susceptors which receive substrates to be deposited upon. In one implementation, a substrate susceptor includes a body having a substrate receiving side. The substrate receiving side has a face having a substrate receiving recess formed therein. The recess has an outer peripheral sidewall. At least three projections extend outwardly from a portion of the face. The projections respectively comprise a radially inner sidewall which extends outwardly from the recess outer peripheral sidewall to a projection upper surface. Other aspects and implementations are contemplated.
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