Exposure apparatus for liquid crystal panel and exposure apparatus
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United States of America Patent
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Issued Date -
Aug 10, 2006
app pub date -
Feb 12, 2004
filing date -
Feb 21, 2003
priority date (Note) -
Abandoned
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Abstract
A composite ceramic material with a honeycomb structure which is composed by adding glass into silicon carbide is used for a mask stage (2) and a substrate stage (12) in an exposure apparatus (100) for liquid crystal panels.
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