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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
HUTCHINSON TECHNOLOGY INCORPORATED	40 WEST HIGHLAND DRIVE NE HUTCHINSON MN 55350

International Classification(s)

• G11B:INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BET....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Fossum, Randolph Edward	Richfield, MN	4	32
# of filed Patents : 4 Total Citations : 32
Linnertz, Wade A	Chaska, MN	7	92
# of filed Patents : 7 Total Citations : 92
Van, Sloun Shane J	Waconia, MN	11	77
# of filed Patents : 11 Total Citations : 77
Zhang, Yiduo	Fremont, CA	24	580
# of filed Patents : 24 Total Citations : 580

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Patent Citation Ranking

• 9 Citation Count
• G11B Class

• 3.76 % this patent is cited more than
• 19 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2008/0163,096

METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

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Abstract

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Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

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Description

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