MEMS flow module with pivoting-type baffle
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United States of America Patent
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Issued Date -
Aug 3, 2006
app pub date -
Feb 1, 2005
filing date -
Feb 1, 2005
priority date (Note) -
Abandoned
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Abstract
Various embodiments of MEMS flow modules that regulate flow or pressure by the pivoting or pivoting-like movement of a flow regulating or controlling structure are disclosed. One such MEMS flow module (40) has a flow regulating structure (62) including a plurality of baffles (66) and a flow plate (50) including a plurality of flow ports (52). The flow regulating structure (62) also has a support (64) that is spaced from and anchored to the flow plate (50). Each baffle (66) is aligned with at least one flow port (52) and is interconnected to the support (64) of the flow regulating structure (62) in a manner that allows the baffles (66) to flex away from the flow plate (50) based upon the development of at least a certain differential pressure across the MEMS flow module (40).
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