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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MOTION COMPUTING	8601 RR 2222 BUILDING 11 SUITE 100 AUSTIN TX 78730

International Classification(s)

• H02J:CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR D....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Rylander, Mark	Austin, TX	6	283
# of filed Patents : 6 Total Citations : 283
Ulla, Imran	Austin, TX	7	390
# of filed Patents : 7 Total Citations : 390

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Patent Citation Ranking

• 7 Citation Count
• H02J Class

• 1.42 % this patent is cited more than
• 19 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 7393432

RF ground switch for plasma processing system

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Abstract

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An arrangement in a plasma processing system for selectively providing an RF grounding path between an electrode and ground. The arrangement includes an RF conduction path structure and an annular structure. The annular structure and the RF conduction path structure having two relative positions relative to one another. A first relative position of the two relative positions is characterized by the annular structure electrically coupling with the RF conduction path structure to provide a ground to the RF conduction path structure. A second relative position of the two relative positions is characterized by the annular structure being electrically uncoupled from the RF conduction path.

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Description

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Claims

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Legal Events

 

• MAFP2020
• FPAY2016
• FPAY2012
• I2008
• STCF2008
• P2006
• F2004
• AS2004

Date	Code	Event	Description
Jan 02, 2020	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 12TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1553); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 12
Jan 01, 2016	FPAY	FEE PAYMENT	year of fee payment: 8
Jan 03, 2012	FPAY	FEE PAYMENT	year of fee payment: 4
Jul 01, 2008	I	Issuance
Jun 11, 2008	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Mar 30, 2006	P	Published
Sep 29, 2004	F	Filing
Sep 29, 2004	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DHINDSA, RAJ;KOZAKEVICH, FELIX;LENZ, ERIC;AND OTHERS;REEL/FRAME:015850/0900;SIGNING DATES FROM 20040923 TO 20040927 Owner name: LAM RESEARCH CROPORATION, CALIFORNIA