Low temperature, atmospheric pressure plasma generation and applications
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United States of America Patent
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Issued Date -
Jul 20, 2006
app pub date -
Sep 14, 2005
filing date -
Jan 19, 2005
priority date (Note) -
Abandoned
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Abstract
Devices and methods for generating a low temperature atmospheric pressure plasma are disclosed. A method of generating a low temperature atmospheric pressure plasma that comprises coupling a high-frequency power supply to a tuning network that is connected to one or more electrodes, placing one or more non-conducting housings between the electrodes, flowing gas through the one or more housings, and striking and maintaining the plasma with the application of said high-frequency power is described. A technique for the surface treatment of materials with said low temperature atmospheric pressure plasma, including surface activation, cleaning, sterilization, etching and deposition of thin films is also disclosed.
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