X-ray fluorescence analyzer
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United States of America Patent
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Issued Date -
Jul 13, 2006
app pub date -
Mar 11, 2004
filing date -
Mar 27, 2003
priority date (Note) -
Abandoned
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Abstract
A wavelength dispersion type X-ray fluorescence spectrometer, though simple and inexpensive in structure owning to the use of a single X-ray detector, has a capability of measuring the respective intensities of a plurality of secondary X-rays of different wavelengths with a sufficient sensitivity over a wide range. The spectrometer includes an X-ray source (3), a divergence slit (5), an analyzing crystal (7), and a single detector (9), in which a plurality of bent analyzing crystals (7A and 7B), fixedly arranged in a direction, in which the optical paths (6 and 8) of travel of the secondary X-rays spread as viewed from a sample (1) and the detector (9), are used as the analyzing crystal (7) to thereby measure the respective intensities of the plural secondary X-rays (8a and 8b) of the different wavelength.
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