Tubular sputtering target
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United States of America Patent
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N/A
Issued Date -
Jul 13, 2006
app pub date -
Dec 2, 2005
filing date -
Dec 2, 2004
priority date (Note) -
Abandoned
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Abstract
A tubular sputtering target with a target body and with an attachment device arranged at at least one end of the target body. The attachment device and/or an end cover are joined with the target body by material joining or positive locking.
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