Composite plate device for thermal transpiration micropump
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United States of America Patent
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Issued Date -
Jul 6, 2006
app pub date -
Dec 14, 2005
filing date -
Dec 30, 2004
priority date (Note) -
Abandoned
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Abstract
The present invention provides a composite plate device for a thermal transpiration micropump apparatus. The provided composite plate device includes a substrate having a plurality of flow channels and a plurality of templates with closed sidewalls, wherein the plurality of flow channels allow fluid to flow therethrough and have a feature length larger than or equal to the mean free path length of the fluid. The provided composite plate device further includes a porous material that is filled in the plurality of templates of the substrate, wherein the porous material allows the fluid to flow therethrough and has an equivalent pore diameter smaller than or equal to the mean free path length of the fluid.
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