Vacuum device
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United States of America Patent
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Issued Date -
Jun 15, 2006
app pub date -
Dec 14, 2005
filing date -
Dec 15, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention is, in a vacuum device which comprises at least a plurality of vacuum containers which are located in series via gate valves, at least one carrier located in the vacuum containers and movable between the vacuum containers, a first exhaust mechanism connected to the vacuum containers, a vacuum forming mechanism connected to the vacuum containers and a gas supplying mechanism for supplying gas to the vacuum containers, the invention is that the vacuum forming mechanism comprises a vacuum pump and an intermediate container between the vacuum pump and the vacuum containers.
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