Vacuum closure with linear drive unit

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20060102863A1
SERIAL NO

11143822

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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This invention relates to a vacuum treatment installation and a device therefor for the tight, especially vacuum-tight closing of an aperture, in particular a slit-like or rectangular aperture with a length that is preferably a multiple of the width of the aperture, in particular for a lock arrangement of a vacuum treatment installation, said device having a closure member (2) and for said closure member a linear drive unit (3,4,5) which, by way of a translational movement, can move the closure member from an open position into a closed position, said closure member having a sealing surface which is disposed in a plane (16) and which, in the closed position, makes sealing contact with a counter-sealing surface on the aperture side, and said plane running perpendicular to the direction of the translational movement (14) and at an oblique angle to the aperture normal (13).

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Patent Owner(s)

Patent OwnerAddress
APPLIED FILMS GMBH & CO KGSIEMENSSTRASSE 100 D-63755 ALZENAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bangert, Stefan Steinau, DE 81 558
Fuchs, Frank Geiselbach, DE 25 242
Konig, Michael Frankfurt am Main, DE 26 161
Lindenberg, Ralph Budingen, DE 22 92
Schussler, Uwe Aschaffenburg, DE 11 41
Stolley, Tobias Frankfurt am Main, DE 24 76

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