Method and device for processing inside of transparent material

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United States of America Patent

SERIAL NO

10514648

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Abstract

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A shape with a substantially perfect sphere, or a cross-sectional shape with a substantially perfect circle in a direction parallel to an advance direction of a femtosecond laser light beam, is obtained as a processed shape such as a modified shape of a worked shape. Rays of femtosecond laser light (L1, L2) are entered into lenses (16, 20), respectively, and the rays of laser light are focused inside a transparent material (100) by the lenses such that each of the optical axes of the rays has a predetermined angle. The light focus positions of the rays of femtosecond laser light are superposed inside the transparent material and the inside of the material is processed.

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Patent Owner(s)

Patent OwnerAddress
HOYA CANEO OPTRONICS CORPORATIONSAITAMA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Ya Saitama, JP 11 46
Midorikawa, Katsumi Saitama, JP 13 83
Shihoyama, Kazuhiko Saitama, JP 1 3
Sugioka, Koji Saitama, JP 8 180

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