Method and device for plasma treating workpieces
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Apr 27, 2006
app pub date -
May 9, 2003
filing date -
May 24, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (4) of a treatment station (17), which can be at least partly evacuated, and at least one part (18) of the treatment station is moved relative to another part (27, 35) thereof in order to help manipulate the workpieces. The movement is carried out in such a way that a shell-shaped chamber wall (18) is positioned relative to a floor (35) of the chamber and relative to a chamber lid (27).
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully