High fill ratio reflective spatial light modulator with hidden hinge
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United States of America Patent
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app pub date -
Nov 30, 2005
filing date -
Jun 19, 2002
priority date (Note) -
Abandoned
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Abstract
A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.
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