Clamping device and transport mechanism for transporting substrates
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United States of America Patent
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Jul 8, 2008
Grant Date -
Apr 6, 2006
app pub date -
Sep 29, 2005
filing date -
Oct 1, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A clamping device contains a clamp jaw fixed in vertical direction, a clamp jaw moveable in vertical direction and a force transducer for applying a force to the moveable clamp jaw. The moveable clamp jaw is curved. The force transducer preferably comprises a coil and an iron core. In the non-clamping condition of the clamping device, the moveable clamp jaw is loaded with the weight of the iron core. For clamping, a current is applied to the coil that produces a magnetic field that presses the iron core against the moveable clamp jaw.
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