Microelectromechanical electrostatic actuator assembly
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United States of America Patent
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Issued Date -
Mar 16, 2006
app pub date -
Sep 16, 2004
filing date -
Sep 16, 2004
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Abandoned
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Abstract
A MEMS electrostatic actuator assembly for connection to a DC voltage supply includes a MEMS device and a capacitive element. The MEMS device has a conductive member and a restoring force element. The conductive member is continuously movable between first and second positions in response to the electrostatic force produced by the DC voltage supply. The restoring force element provides a restoring force to the conductive member to move it back to the first position. The capacitive element is coupled in series between the MEMS device and the DC voltage supply and is used to limit the electrostatic force produced within the MEMS device to a value substantially equal to the maximum restoring force provided by the restoring force element.
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