Particle filter for microelectromechanical systems
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United States of America Patent
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app pub date -
Apr 4, 2005
filing date -
Aug 20, 2002
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Abandoned
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Abstract
A particle filter for microelectromechanical systems is provided that includes a particle trap formed on a substrate material. The particle trap includes an array of multidimensional geometric structures in an adjacent relationship. The geometric structures further define a plurality of multidimensional voids therebetween for trapping particles therein. The individual multidimensional geometric structures are formed by a plurality of vertically interconnected geometric shapes to define different configurations of voids between the adjacent geometric structures. In one embodiment of the filter system, an electrical bias is applied to the array of multidimensional geometric structures to facilitate attracting and trapping of particles in the filter.
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