Integrated simulation fabrication and characterization of micro and nano optical elements
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United States of America Patent
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Issued Date -
Mar 2, 2006
app pub date -
Nov 6, 2003
filing date -
Nov 6, 2002
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Abandoned
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Abstract
The invention is directed to a method for fabricating a micro or nano structure such as an optical waveguide incorporating an emitting surface in the form of a lens. The structure is fabricated on the basis of a theoretical simulation of the structure, with the parameters of the structure being characterized by geometric and light profiling using near-field and far-field monitoring. The results of the characterizing are compared iteratively with the simulation during fabrication.
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