Mass flow controller
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United States of America Patent
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Issued Date -
Feb 23, 2006
app pub date -
Mar 20, 2003
filing date -
Mar 25, 2002
priority date (Note) -
Abandoned
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Abstract
The invention presents a mass flow controller capable of supplying always stably at desired flow rate in spite of pressure fluctuations at either upstream side or downstream side of the mass flow controller. The invention is a mass flow controller having a flow rate control valve and a flow rate sensor, more specifically comprising a pressure control valve disposed at the upstream side of the flow rate control valve, a pressure sensor disposed between this pressure control valve and the flow rate control valve, and a controller for controlling the pressure control valve by feeding back the output of this pressure sensor.
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