Supporting and lifting device for substrates in vacuum
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United States of America Patent
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Issued Date -
Jan 26, 2006
app pub date -
May 25, 2005
filing date -
May 28, 2004
priority date (Note) -
Abandoned
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Abstract
A pin assembly for lifting and supporting substrates according to the invention comprises a roller glide for a lift pin with rollers reducing the friction of the vertical pin movement, a ball bearing sole plate with elastic suspension for re-centering the sole plate after one coating cycle and a ball-bearing pin head that lowers the friction between the pin and the substrate and minimizes lateral forces that the substrate can apply on the pin.
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