Measurement method of electron beam current, electron beam lithography method and system
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United States of America Patent
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Issued Date -
Jan 19, 2006
app pub date -
Jul 14, 2005
filing date -
Jul 15, 2004
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Abandoned
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Abstract
In an electron-beam lithography system for performing a pattern drawing by causing electron beams to be switched ON/OFF at a high speed in an exposure/non-exposure portion, non-straight line property of beam shot dosage relative to beam ON time worsens dimension accuracy of the drawing pattern formed on a sample. In order to avoid this drawback, the characteristic of the beam shot dosage relative to the beam ON time is measured in advance, thereby creating correction data for the beam ON time beforehand. Then, at the time of performing the pattern drawing, the beam ON time is corrected based on the correction data so that desired beam shot dosage becomes acquirable.
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