Low vacuum scanning electron microscope
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United States of America Patent
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Issued Date -
Jan 19, 2006
app pub date -
Jul 12, 2005
filing date -
Jul 13, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
High resolution observation is achieved at a low acceleration voltage of 5 kV or below under a high pressure condition of a sample chamber. A sample chamber has a double structure and an inner sample chamber for keeping low vacuum is arranged inside an outer sample chamber having high vacuum. A relatively high negative voltage such as -1 to -9 kV for decelerating electrons immediately before a sample is applied between the outer sample chamber and the inner sample chamber. When an incident electron beam passes through an objective lens, an electron beam keeping high energy and having small aberration is formed and is decelerated immediately before the sample to acquire high resolution at a low acceleration voltage.
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