Method and apparatus for molding a semiconductor device

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United States of America Patent

PATENT NO 7241414
APP PUB NO 20050287236A1
SERIAL NO

10876922

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Abstract

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A method and apparatus is provided for molding a semiconductor device in a mold including two mold halves. One mold half includes a compressible sealing mechanism constructed and configured to exert a sealing pressure between a surface of the mold half and a surface of a semiconductor device located in the mold. A compliant tape is positionable onto the mold half comprising the sealing mechanism between the semiconductor device and the sealing mechanism for molding of the semiconductor device.

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Patent Owner(s)

Patent OwnerAddress
ASM TECHNOLOGY SINAGPORE PTE LTD2 YISHUN AVENUE 7 SINGAPORE 768924

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Shu C Singapore, SG 1 5
Kuah, Teng H Singapore, SG 1 5
Lee, Shuai G Singapore, SG 1 5
Li, Chun Y Singapore, SG 1 5
Lin, Yi Singapore, SG 122 1239
Zhang, Zhi P Singapore, SG 1 5

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