Integrated gas control device
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United States of America Patent
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N/A
Issued Date -
Dec 29, 2005
app pub date -
May 19, 2005
filing date -
Jun 25, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An integrated gas control device comprising a flow path plate provided with entrance and exit holes penetrating the flow path plate in a direction of wall thickness thereof to form entrance side gangways and exit side gangways, opening groove parts opened in one or both of opposite face sides of the flow path plate and adapted to connect the entrance side and exist side gangways, seal plates for closely sealing the opening groove parts to form gas flow paths in the flow path plate, and integration units, including automatic valves, each having a flow path that are so mounted on the flow path plate as to connect the flow path to the entrance and exit holes of the flow path plate and so disposed as to allow supply of a gas including a process gas.
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