Wedge-shaped window for providing a pressure differential

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United States of America Patent

APP PUB NO 20050268567A1
SERIAL NO

10631516

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Abstract

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As part of a chamber configuration, a window arrangement includes a chamber having an interior. The chamber forms a window aperture having an aperture edge. A window, having a pair of opposing major surfaces and a peripheral sidewall configuration extending between the opposing major surfaces, is received in the window aperture with the peripheral sidewall configuration supported against the aperture edge such that the peripheral sidewall configuration and the aperture edge cooperate in a way which converts at least a portion of a biasing force, that is applied generally normal to the opposing major surfaces of the window, to a direction that is different from, oblique to, or sloped with respect to an applied direction of the biasing force.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Devine, Daniel J Los Gatos, CA 31 2112
Lee, Young Jai Sunnyvale, CA 9 1095

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