Plasma processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20050257891A1
SERIAL NO

10388849

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

There is provided a plasma treatment apparatus capable of treating a square shaped substrate having a large area even in the case of using reactive plasma, the plasma treatment apparatus including a waveguide 1, a waveguide antenna 2 made up of slots provided on the H-surface of the waveguide 1, an electromagnetic wave radiation window 4 made of a dielectric, a dielectric space 10 sandwiched between the waveguide 2 and the electromagnetic wave radiation window 4, and generating plasma by using the electromagnetic wave radiated from the waveguide antenna 2 through the electromagnetic wave radiation window 4, wherein an uneven portion 11 is provided on the surface of the waveguide 1 opposite to the electromagnetic wave radiation window 4.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA EKISHO SENTAN GIJUTSU KAIHATSU CENTER292 YOSHIDA-CHO TOTSUKA-KU YOKOHAMA-SHI KANAGAWA-KEN

International Classification(s)

loading....
  • 2003 Application Filing Year
  • C23C Class
  • 1185 Applications Filed
  • 451 Patents Issued To-Date
  • 38.06 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20032004200520062007200820092010201120122013201420150255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goto, Masashi Yokohama-shi, JP 92 1116
Nakata, Yukihiko Nara-shi, JP 46 1513

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 14 Citation Count
  • C23C Class
  • 51.85 % this patent is cited more than
  • 20 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges922910649201694424701 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0102030405060708090100110120130140150160170180190200210220230240250

Forward Cite Landscape

Load Citation