Anti-reflective coatings using vinyl ether crosslinkers
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United States of America Patent
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Issued Date -
Nov 17, 2005
app pub date -
Apr 14, 2005
filing date -
Apr 29, 2004
priority date (Note) -
Abandoned
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Abstract
Novel, wet developable anti-reflective coating compositions and methods of using those compositions are provided. The compositions comprise a polymer and/or oligomer having acid functional groups and dissolved in a solvent system along with a crosslinker and a photoacid generator. The preferred acid functional group is a carboxylic acid, while the preferred crosslinker is a vinyl ether crosslinker. In use, the compositions are applied to a substrate and thermally crosslinked. Upon exposure to light, the cured compositions will decrosslink, rendering them soluble in typical photoresist developing solutions (e.g., alkaline developers).
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