Image sensor having notch filter and method for fabricating the same
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United States of America Patent
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Issued Date -
Oct 27, 2005
app pub date -
Mar 4, 2005
filing date -
Apr 23, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Disclosed are an image sensor and a method for fabricating the same. The method includes the steps of: forming a plurality of photodiodes on a substrate; forming an insulation layer on the plurality of photodiodes; alternatively depositing an oxide layer and a nitride layer plural times on the insulation layer; forming a plurality of notch filters for blocking a green light by alternatively stacking the oxide layer and the nitride layer in a plurality of color filter regions of red and blue after selectively removing the oxide layer and the nitride layer stacked alternatively in the green color filter region; forming a planarization layer on the plurality of notch filters; and forming a plurality blue, green and red color filters on the plurality of notch filters.
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