Apparatus for supporting substrate
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United States of America Patent
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Issued Date -
Oct 20, 2005
app pub date -
Apr 20, 2005
filing date -
Apr 20, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus (20) for supporting a substrate (S2) includes a number of slats (28), a number of connecting blocks (24) separately positioned on the slats, and a number of soft sleeves (22) connected with the connecting blocks, respectively. Because top surfaces of the soft sleeves are shaped as annular, the force applied between the substrate and the soft sleeves is distributed, and is reduced at each contact point. The surface of the substrate is hardly if at all deformed by the soft sleeves, thereby reducing the risk of or even altogether preventing the formation of undulations. The quality of the pattern to be processed is improved.
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