Rotary machine for cvd coatings

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20050229850A1
SERIAL NO

10514880

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Abstract

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A method and apparatus are provided for allowing effective and fast CVD coating of workpieces. The invention provides a rotary apparatus for treatment, in particular CVD-coating, which includes a conveyor carousel, treatment stations, which are transported by the conveyor carousel, and at least one first pump device. The first pump device is transported by the conveyor carousel.

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Patent Owner(s)

Patent OwnerAddress
SCHOTT AGMAINZ GERMANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arnold, Gregor Bodenheim, DE 15 539
Behle, Stephan Hahnheim, DE 23 1190
Bicker, Matthias Mainz, DE 33 1320
Klein, Jurgen Mainz, DE 29 793
Luttringhaus-Henkel, Andreas Darmstadt, DE 15 399

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