Method and apparatus for selective, incremental, reconfigurable and reusable semiconductor manufacturing resolution-enhancements
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United States of America Patent
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Issued Date -
Oct 13, 2005
app pub date -
Apr 7, 2004
filing date -
Apr 7, 2004
priority date (Note) -
Abandoned
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Abstract
An automated design for manufacturability platform for integrated physical verification and manufacturing enhancement operations. Given original layouts and one or more associated resolution-enhanced layouts, intermediate resolution-enhancement state layouts are reconstructed, and selective localized resolution-enhancement reconfigurations, modifications, and/or perturbations are introduced on any existing enhancements in order to improve manufacturability and yield.
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