Porous ceramic laminate and production thereof
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United States of America Patent
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May 31, 2005
filing date -
Mar 3, 2000
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Abstract
A porous ceramic laminate has a porous silicon nitride substrate and a porous silicon nitride separation film supported thereon and having minute pores of sizes capable of Knudsen separation or molecular sieve by sintering a porous silicon nitride substrate supporting a formed layer containing polysilazane at 800.degree. C. in a nitrogen atmosphere.
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