Adjustable exhaust flow for thermal uniformity
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United States of America Patent
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Apr 11, 2006
Issued Date -
N/A
app pub date -
Mar 26, 2004
filing date -
Mar 26, 2004
priority date (Note) -
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Abstract
A method and apparatus for adjusting exhaust flow, and the apparatus has a programmable exhaust control regulator generating a first input signal to a motor control circuit, an exhaust flow meter generating a second input signal to the motor control circuit and a motor driven control valve moved to different positions according to the first and second input signals, the control valve being installed in an exhaust portion of the hot plate apparatus.
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