System and method for automatically transferring a defect image from an inspection system to a database
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United States of America Patent
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Issued Date -
Sep 22, 2005
app pub date -
May 20, 2005
filing date -
Nov 21, 2002
priority date (Note) -
Abandoned
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Abstract
A system and method for automatically transferring a defect image from an inspection system to a database are disclosed. The method includes identifying a defect on a lithography component loaded into an inspection system and capturing an image of the identified defect. An operator is prompted to select a defect code for the identified defect and the captured image is automatically transferred to a database in response to the operator selecting the defect code.
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