Polymers of polycyclic olefins having a polyhedral oligosilsesquioxane pendant group and uses thereof

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United States of America Patent

SERIAL NO

11054963

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments in accordance with the present invention encompass polymers having at least one norbornene-type repeating unit derived from a norbornene-type monomer having a polyhedral oligosilsesquioxane pendant group. Such polymers, are formed by addition polymerizations that employ one of a neutral or cationic palladium catalyst or a neutral nickel catalyst. Such polymers are useful for a variety of applications such as a positive tone or negative tone photodefinable material, a low-k dielectric constant material, an etch selective layer, a sacrificial material or the like. In addition, embodiments of the present invention include devices formed using such polymers.

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Patent Owner(s)

Patent OwnerAddress
PROMERUS LLC225 W BARTGES STREET AKRON OH 44307

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elce, Edmund Lakewood, OH 32 308
Lipian, John-Henry Medina, OH 15 306
Ravikiran, Ramakrishna Strongsville, OH 19 351
Rhodes, Larry F Silver Lake, OH 116 936
Seger, Larry Gates Mills, OH 2 29
Shick, Robert Strongsville, OH 7 115

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